UNIT

マスフローコントローラー

説明: マスフローコントローラとは、質量流量計(質量流量を測る流量計)に流量制御の機能を持たせたもののことである.

UFC-1000 Series
UFC-3160 Series
GF Series
UFC-1100 Series
UFC-3165 D-Net
UPC-1300
UFC-1160/1161 Series
UFC-2550/3550 SDS Series
UPC-1360
UFC-1200 Series
UFC-7300 Series
UPC-8130
UFC-1260/1261 Series
UFC-8100 Series
UTS-1100
UFC-1400 Series
UFC-8160/8161 Series
UTS-2000
UFC-1500 Series
UFC-8165 D-Net
UTS-3000
UFC-1660/1661 Series
UFC-8200 Series
URS-20
UFC-1662 SDS Series
UFC-8500 Series
URS-40
UFC-1665 D-Net
UFC-9150 Series
URS-100
UFC-2000 Series
IFC-125 Series
URS-100-5
UFC-3000 Series