KENSINGTON

ロボット

説明: 半導体ウエハ搬送ロボットは、半導体製造装置内でウエハなどの搬送用途として使用されます。

3軸Robot
3NT410B
Controller 30D60E
5軸Robot
3NT420B
Controller 30D63E
ALIGNER
3NT510B
Controller 30D60F
3軸Controller R1
3NT520B
Controller 30D65F
3軸Controller R2
3NT570B
Controller 30D65I
5軸Controller
3TX201B
Controller 30D61K
3NS410B-Axxx
Controller C61C
Controller 30D65K
3NS410B-Bxxx
Controller C61D
Controller 30D60H
3NS411B-Fxxx
Controller C61E
Controller 30D66D
3NS411B-Gxxx
Controller 30C61C
Controller 30D66E
3NS511C-Fxxx
Controller 30C61D
Controller 30C08H
3NS511C-Gxxx
Controller 30C61E
Pre-Aligner
3NS420B
Controller 30C60F
TS220 MHU
3NS510S
Controller 30C63E
TS310 IHU
3NS520S
Controller 30C65E
TS520 BHU
3NX510B
Controller 30C65F
SS621/SL922
3NX520B
Controller 30D61H
SS610/611/920/921 Arm
3NX540B
Controller 30D61I
FC-3100 Arm
3NX550B
Controller 30D60G
TS/520/310/220 Arm