KENSINGTON、ロボット

KENSINGTON

ロボット

説明: 半導体ウエハ搬送ロボットは、半導体製造装置内でウエハなどの搬送用途として使用されます。

3軸Robot	3NT410B	Controller 30D60E
5軸Robot	3NT420B	Controller 30D63E
ALIGNER	3NT510B	Controller 30D60F
3軸Controller R1	3NT520B	Controller 30D65F
3軸Controller R2	3NT570B	Controller 30D65I
5軸Controller	3TX201B	Controller 30D61K
3NS410B-Axxx	Controller C61C	Controller 30D65K
3NS410B-Bxxx	Controller C61D	Controller 30D60H
3NS411B-Fxxx	Controller C61E	Controller 30D66D
3NS411B-Gxxx	Controller 30C61C	Controller 30D66E
3NS511C-Fxxx	Controller 30C61D	Controller 30C08H
3NS511C-Gxxx	Controller 30C61E	Pre-Aligner
3NS420B	Controller 30C60F	TS220 MHU
3NS510S	Controller 30C63E	TS310 IHU
3NS520S	Controller 30C65E	TS520 BHU
3NX510B	Controller 30C65F	SS621/SL922
3NX520B	Controller 30D61H	SS610/611/920/921 Arm
3NX540B	Controller 30D61I	FC-3100 Arm
3NX550B	Controller 30D60G	TS/520/310/220 Arm