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설명 : 반도체 웨이퍼 반송 로봇은 반도체 제조 장치 내에서 웨이퍼 등의 반송 용도로 사용됩니다.
3軸Robot |
3NT410B |
Controller 30D60E |
5軸Robot |
3NT420B |
Controller 30D63E |
ALIGNER |
3NT510B |
Controller 30D60F |
3軸Controller R1 |
3NT520B |
Controller 30D65F |
3軸Controller R2 |
3NT570B |
Controller 30D65I |
5軸Controller |
3TX201B |
Controller 30D61K |
3NS410B-Axxx |
Controller C61C |
Controller 30D65K |
3NS410B-Bxxx |
Controller C61D |
Controller 30D60H |
3NS411B-Fxxx |
Controller C61E |
Controller 30D66D |
3NS411B-Gxxx |
Controller 30C61C |
Controller 30D66E |
3NS511C-Fxxx |
Controller 30C61D |
Controller 30C08H |
3NS511C-Gxxx |
Controller 30C61E |
Pre-Aligner |
3NS420B |
Controller 30C60F |
TS220 MHU |
3NS510S |
Controller 30C63E |
TS310 IHU |
3NS520S |
Controller 30C65E |
TS520 BHU |
3NX510B |
Controller 30C65F |
SS621/SL922 |
3NX520B |
Controller 30D61H |
SS610/611/920/921 Arm |
3NX540B |
Controller 30D61I |
FC-3100 Arm |
3NX550B |
Controller 30D60G |
TS/520/310/220 Arm |