KENSINGTON, 机器人

KENSINGTON

机器人

描述：半导体晶圆传送机器人用于在半导体制造设备内传送晶圆等。

3軸Robot	3NT410B	Controller 30D60E
5軸Robot	3NT420B	Controller 30D63E
ALIGNER	3NT510B	Controller 30D60F
3軸Controller R1	3NT520B	Controller 30D65F
3軸Controller R2	3NT570B	Controller 30D65I
5軸Controller	3TX201B	Controller 30D61K
3NS410B-Axxx	Controller C61C	Controller 30D65K
3NS410B-Bxxx	Controller C61D	Controller 30D60H
3NS411B-Fxxx	Controller C61E	Controller 30D66D
3NS411B-Gxxx	Controller 30C61C	Controller 30D66E
3NS511C-Fxxx	Controller 30C61D	Controller 30C08H
3NS511C-Gxxx	Controller 30C61E	Pre-Aligner
3NS420B	Controller 30C60F	TS220 MHU
3NS510S	Controller 30C63E	TS310 IHU
3NS520S	Controller 30C65E	TS520 BHU
3NX510B	Controller 30C65F	SS621/SL922
3NX520B	Controller 30D61H	SS610/611/920/921 Arm
3NX540B	Controller 30D61I	FC-3100 Arm
3NX550B	Controller 30D60G	TS/520/310/220 Arm