ROBOT
Description: Semiconductor wafer transfer robots are used to transfer wafers, etc. within semiconductor manufacturing equipment.
3軸Robot
|
3NT410B
|
Controller 30D60E
|
5軸Robot
|
3NT420B
|
Controller 30D63E
|
ALIGNER
|
3NT510B
|
Controller 30D60F
|
3軸Controller R1
|
3NT520B
|
Controller 30D65F
|
3軸Controller R2
|
3NT570B
|
Controller 30D65I
|
5軸Controller
|
3TX201B
|
Controller 30D61K
|
3NS410B-Axxx
|
Controller C61C
|
Controller 30D65K
|
3NS410B-Bxxx
|
Controller C61D
|
Controller 30D60H
|
3NS411B-Fxxx
|
Controller C61E
|
Controller 30D66D
|
3NS411B-Gxxx
|
Controller 30C61C
|
Controller 30D66E
|
3NS511C-Fxxx
|
Controller 30C61D
|
Controller 30C08H
|
3NS511C-Gxxx
|
Controller 30C61E
|
Pre-Aligner
|
3NS420B
|
Controller 30C60F
|
TS220 MHU
|
3NS510S
|
Controller 30C63E
|
TS310 IHU
|
3NS520S
|
Controller 30C65E
|
TS520 BHU
|
3NX510B
|
Controller 30C65F
|
SS621/SL922
|
3NX520B
|
Controller 30D61H
|
SS610/611/920/921 Arm
|
3NX540B
|
Controller 30D61I
|
FC-3100 Arm
|
3NX550B
|
Controller 30D60G
|
TS/520/310/220 Arm
|