• High-quality and speedy response in collaboration with overseas suppliers.

    Handling of various manufacturers and models.

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CANNO, ROBOT

CANON

ROBOT

Description: Semiconductor wafer transfer robots are used to transfer wafers, etc. within semiconductor manufacturing equipment.

ES3L
ES3-Z
RETICLE ROBOT
ES4R
PA STAGE UNIT
TYPE X (WAFER THERMAL CONTROL)
ES3-X 
RELAY UNIT
WAFER FEED HAND UNIT