PCBボード

P/N

Description

使用装置

0090-03467

0090-03467, SYNERGY V452 SBC

AMAT

0190-13065

VGA BOARD

AMAT

0100-00782

PCB ASSY ALNALOG INPUT

AMAT

0100-01894

AO BOARD

AMAT

0100-11002

DI / DO BOARD

AMAT

0100-20001

SEI BOARD

AMAT

0100-00011

CHOPPER DRIVER BOARD

AMAT

0100-09009

BUFFER I/O BOARD

AMAT

0100-20068

CCD BOARD (30074095R1)

AMAT

0100-76259

WAFER ORIENTER PCB BOARD

AMAT

9700-4282-01

INDEXER CONTROL BOARD 

AMAT

0100-35265

PCB TC AMP INTERLOCK DXZ

AMAT P5000

0100-09071

PCB SBC I/O BREAKOUT

AMAT P5000

0100-09117

PCB DI/DO FUSE 28 LINE BWCVD

AMAT P5000

0100-09006

PCB INTELLIGENT INTERFACE

AMAT P5000

0100-09180

PCB LIQUID SOURCE HEATER CONTROL

AMAT P5000

0090-09062

PCB THHERMAL ELECTRIC DRIVER

AMAT P5000

0100-35058

PCB LOADLOCK INTERLOCKS

AMAT P5000

0100-20038

PCB RELAY CONTROL

AMAT P5000

0100-00172

PCB HE CONTROL

AMAT P5000

0100-35024

PCB CENTER FINDER SBC

AMAT P5000

0100-00014

PCB OPTO DETECT

P5000/Centura

0100-09011

PCB A/I MULTIPLEXER

AMAT P5000

0100-00008

PCB ASSEMBLY T.C. GAUGE MONITOR

AMAT P5000

0100-00398

PCB SYSTEM ELECTRONICS INTERFACE (SEI)

AMAT P5000

0100-09020

PCB FUSE BOARD

AMAT P5000

0100-11001

PCB ANALOG OUTPUT

AMAT P5000

0190-09379

WPCB ASSY, VME CPU SYNERGY UPGRADE

AMAT P5000

0090-76110

SBC BOARD 

AMAT P5000

0090-76109

ASSY ELECTRICAL SBC SYNERGY

AMAT

0100-02735

VGA BOARD 

AMAT

0100-00396

PCB ASSY ANALOG INPUT/OUTPUT(Centura)

AMAT

0100-76124

PCB DIGITAL I/O (DI/O BOARD)

AMAT

0190-09939

OMS BOARD REPAIR

AMAT

0100-01996

ASSY PCB SEISEI BOARD

AMAT

0100-01130

CCD BOARD REPAIR (30000896R1)

AMAT

0100-09196

ESC CONTROL BOARD

AMAT

0190-09688

CENTURA, SERIPLEX BOARD

AMAT

0100-35054

CENTURA, CHAMBER INTERCONNECT BOARD

AMAT

0100-20084

CENTURA, MFC INTERCONNECT BOARD

AMAT

0100-00957

STEEPER CONTROL BOARD 

AMAT

0100-00426

INTERLOACK BOARD 

AMAT

0100-20007

Pneumatuc distribution board 

AMAT

0100-35173

SERIIPLEX POWER DISTRIBUTION BOARD

AMAT

0100-09389

TC AMP  INTERLOCK BOARD REPAIR (WxZ red bin)

AMAT

0190-76005

OMS BOARD 

AMAT

0190-35650

SERIPLEX CONTROL BUS ASSY BD 

Centura /(Etch/T/CVD/PVD)

0100-09222

CHAMBER INTERFACE BD FOR DPS CENTURA 

AMAT

0100-35054

CHAMBER INTERFACE BD 

AMAT

0100-09054

A I/O BOARD

AMAT

0090-00223

I/O EXPANSION CARD 

AMAT

0100-09204

H2O VDSII CONTROLLER BOARD 

Centura,DPS

0660-00221

THERMALOGIC BOARD REPAIR 

Centura /(Etch/T/CVD/PVD)

0100-38083

PCB CHAMBER INTERCONNECT A&C

Centura /(Etch/T/CVD/PVD)

0100-76004

PCB OTF CENTER FINDER CONTROL

Centura /(Etch/T/CVD/PVD)

0100-01985

PCB CENTER FINDER CARD

Centura /(Etch/T/CVD/PVD)

0100-00493

PCB CHAMBER INTERFACE 5200 HDPCVD ULTIMA

Centura /(Etch/T/CVD/PVD)

0100-00259

PCB ASSEMBLY SERIPLEX I/O DISTRIBUTION GPLIS

Centura /(Etch/T/CVD/PVD)

0100-35231

PCB SERIPLEX I/O DISTRIBUTION

Centura

0100-18062

PCB CHAMBER TRAY ULTIMA

Centura

0100-18039

PCB TC FILTER

Centura

0100-35160

PCB TC AMP INTERLOCK DXZ

Centura

0100-35217

PCB TC AMP INTERLOCK

Centura

0100-00241

PCB TC AMP INTERLOCK 300XZ

Centura

0100-35174

PCB CENTURA ACP MATRIX

Centura

0100-09287

PCB CENTURA APC MATRIX

Centura

0190-35765

PCB SERIPLEX MUX I/O

Centura

0100-35250

PCB CHAMBER INTERFACE (DPS)

Centura

0090-00224

PCB I/O EXPANSION WITH DUAL SERIP

Centura

0190-35652

PCB SERIPLEX CHAMBER

Centura

0100-20012

PCB ISOLATION AMP

Centura

0090-76133

 SBC SYNERGY 6804 CPU WITH 16MB RAM (V452)

Centura

0100-10707

PCB ESC CONTROLLER CERAMIC

Centura

0190-76043

PCB SYNERGY SERIAL I/O (V440)

Centura

0100-99011

GAS INTERLOCK BOARD FOR QUANTUM

AMAT

0090-91938

PCB XR80 ARC CONTROL DSP

Centura,DPS

0100-35185

LAMP FAILURE LED BOARD

AMAT

0090-90967

DAQ TYPE H PW SUPPLY FOR QUANTUM

AMAT

0100-00223

PCB WH I/F MBC AMPLIFIER

AMAT

799-550693-001

LAM MCC BOARD

Lam Research

810-034806-104

LAM HALO/VCI INTF BOARD

Lam Research

810-034821-006

LAM MOTHER BOARD

Lam Research

9700-4991-01

LPT/LPI INDEXER BOARD

AYAST

9700-4282-01

INX INDEXER BOARD

AYAST

6900-1448-01

CPU BOARD

AYAST

3200-1077-01

AMPLIFIER/SERVO BOARD

AYAST

6900-1283-01

MOTION BOARD

AYAST

0100-09172

EIGHT CHANNEL EMISSION/LASER  ENDPOINT BD

Centura,DPS