• High-quality and speedy response in collaboration with overseas suppliers.

    Handling of various manufacturers and models.

  • ✉ info@megumi-corp.com
    | 🕒 9:00 ～ 17:00
    Weekdays 9: 00-17: 00 (excluding holidays)
    | ☏ 03-6868-3371
    （Japan Only：+81 3 6868 3371）
LAM, ROBOT

LAM

ROBOT

Description: Semiconductor wafer transfer robots are used to transfer wafers, etc. within semiconductor manufacturing equipment.

Indexer
Vortex Traverser
EOS BE Robot
Vortex
Servo Spindle Assy
EOS BE Controller
Vortex Wet
Lift Module
EOS EFEM Robot
TEBR
MACH 1
EOS EFEM Controller
Vortex Dual Arm Robot
MACH 4
Gammar Controller
Vortex Extreme ATM Robot
MACH 1 Controller
LTM Type 2
Vortex Robot controller
MACH 4 Controller