BROOKS

MASS FLOW CONTROLLER

Description: A mass flow controller is a mass flowmeter (a flowmeter that measures mass flow rate) with a flow rate control function.

0550 Series
5964 Series
SLA 6800 Series
5800S Series
6256 Series
SLA 7800 Series
5850 Series
SLA 4800 Series
SLA 7900 Series
5860 Series
SLA 5800 Series